设备情况
  • 产品名称:STPH451C Edwards涡轮分子泵

  • 产品型号:STPH451C
  • 产品厂商:Edwards
  • 产品文档:
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简单介绍:
STPH451C Edwards涡轮分子泵这种泵经过实践检验的性和的性能可以实现大的制程灵活性。STPH451C 已经由半导体和磁介质行业的大型设备制造商投入使用,并得到了。 STPH451C Edwards涡轮分子泵Edwards 的高性能 STPH451C 涡轮分子泵是为严苛的半导体应用而设计的。
详情介绍:
阐述
Edwards 的强安全性能指标 STPH451C 蜗轮碳原子泵是为严酷的半导体行业内行业内软件而设计的概念的。种泵要经过推动检验检测的性和的安全性能指标应该推动大的工艺机灵性。STPH451C 早已由半导体行业内行业内和磁物料行业内的中小型的设备生产电竞比赛app下载大全投身选择,并得以了。

用途
彩石(铝)、钨和电有机溶剂(被铁的氧化物)还有多晶硅等阴离子刻蚀(氯化物、氟化物和溴化物)
自动化旋回嗡嗡声 (ECR) 刻蚀
膜积聚 CVD、PECVD、ECRCVD、MOCVD
溅射
亚铁离子装入源,射束线水下混凝土端点站
MBE
扩撒
光致抗蚀剂出膜
结晶/晶膜种子发芽
晶片体检
电机负载锁正空腔
科学课检测仪器:外壁数据定量分析、质谱数据定量分析、电子无线体视显微镜
高可力学:射束线、1器
射线线APP:融和控制系统、螺旋

工作和主要优势
的叶轮  
更好的的气体发送量
大的工艺具备灵化学活化高性
无油版
低振动幅度大
高速
免维持
能够用于苛刻生产工艺
用到人类寿命变长
的把控器的设计  
全自动修整
进行评估实用功能
直流变压器减速机动力
无电芯运转
家用suv型制定  
土地征用建筑面积小
半机架调整器
5 轴磁飘浮机系统  
无的污染
少保障

多种角度作业


统计数据

吃下法兰部 ISO160K
KF40
吹扫口 KF10
油闭式冷却塔连接头 PT1/4
抽速
  N2 450 ls-1
  H2 300 ls-1
再压缩比
  N2 >108
  H2 103
进行加热时的超凡心理压力 10-7 Pa

(10-9 Torr)
威海续各种压力 660 Pa

(5 Torr)
大N2货运量 2500 sccm
电机额定功率快速 48000 rpm
重新启动时刻 4 分种
高入口通道活套法兰室温 120 °C
输出电阻值 100 至 120 (± 10) V 交流电或

200 至 240 (± 10) V 联席会
工作电压 0.6 kVA
泵权重 15 kg
管控器载重量 9 kg

Edwards STP-451 3 Axis Magnetic Bearing Ultra High Turbomolecular Pump, 480 l/s Pumping Speed, DN160CF CF 8 in. 
Pump Only NO Accessories. Edwards Part Number B74841010

This listing is for the new Edwards STP-451 3 Axis Magnetic Bearing Ultra High Turbomolecular Pump. To be used with the Edwards SCU-350 Control Unit, pumping speed of 480 liters per second (l/s) of nitrogen, DN160CF CF 8 in. inlet flange, ISO KF-25 exhaust foreline flange, and KF-10 purge port with the corrosion model. A basic pump system would require a Edwards STP-451 pump, a SCU-350 controller, a water cooling accessory and a suitable backing roughing pump. The Edwards STP-451 turbomolecular pump offers field proven reliability for use in electron miscroscopes, scientific instruments and semiconductor applications.
The STP-451 is a series of magnetically-levitated turbomolecular pumps. The STP pump is configured so that rotor blade and the stator blade are aligned alternately in the axial direction. Gas molecules are pumped from the inlet port to the outlet port by the high speed rotation of the rotor. The Rotor blade is supported by the magnetic bearing without mechanical contact. Therefore the STP pump requires no lubrication oil unlike conventional turbomolecular pumps using ball bearings. The magnetic bearing consists of 3 pairs of active magnetic bearings. The rotor is supported in the radial direction by 2 pairs of radial direction active magnetic bearings that consist of radial sensor and radial electromagnet. A pair of axial direction active magnetic bearings consists of axial sensor and axial electromagnet to support the rotor in the axial direction. Because the rotor is thus supported without mechanical contact, it can rotate with very low vibration.
There is less heat generated from magnetic bearings because there is no friction. Therefore the STP pump requires no cooling. However, the STP pump requires water cooling or air cooling during baking, gas pumping or any process. Taking into consideration a breakage of magnetic bearings, touch down bearings and coated with solid lubrication have been installed. They do not contact the rotor during the rated operation. A radial sensor, an axial sensor, a rotational speed sensor and a temperature sensor always monitor the magnetic bearing as well as the rotor. If an abnormality/error occurs, the rotor will stop. 
To ensure a high level of resistance to corrosion, the corrosion resistant models STP (C) have nickel coated rotors/stators and pump inter­nals suitable for ion implantation and plasma etching. These corrosion resistant pumps have a KF10 nitrogen purge facility, a constant flow of nitrogen through the pump dilutes corrosive gases minimizing their damage to the pumps motor and sensor coils. All accessories for this pump are available on this website or call 505-872-0037 for details. For complete specs, see graphic below or download the STP manual.pdf in AVAILABLE DOWNLOADS below.


ITEM DESCRIPTION PART NO.
SCU-350 Controller, Works with STP Pumps: 301, 451, L301, L451 Series YT21Z0Z01
Connection Cable 3 meters PS CS B70700010
Connection Cable 5 Meters PS CS B70700000
Connection Cable 10 Meters PS CS B70700130
Type B Power Cable 3 Meters Ring Terminal B70700090
Type B Power Cable 5 meters Ring Terminal Angle B70700040
Type B Power Cable 10 meters Ring Terminal PT21Y0A00
STP Vibration Isolator ISO-100 B58046000
STP Vibration Isolator ISO-160 B58049000
P021 Damper ICF152 B74834010
P001 Damper ICF203 B70652040
P021 Cooling Fan 100 VAC w/1 Meter Cable (P021/P039) YT01BA500
P021 Cooling Fan 115 VAC w/1 Meter Cable YT011A003
P021 Cooling Fan 200 VAC w/1 Meter Cable (P021/P039) YT011A000
Water Cooling Unit RC1/4 Hose YT21CA001


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