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厂品信息
简单介绍：
STP-iXR2206 ISO250F Edwards磁悬浮涡轮分子泵其设计理念与 STP-iXA2206/iXA3306 系列相同。新的**性转轴设计提高了抽取性能，这一集成的产品易于安装且占地面积小，可作为应用工具的一体化解决方案。
STP-iXR2206 ISO250F Edwards磁悬浮涡轮分子泵可提供业内的性能，机载控制装置中包含新的小型电源供给。
详情介绍：
简述
STP-iXR2206 国产磁悬浮电机按钮涡轮机原子泵可带来了业内人士的能力，机载的控制保护装置中带有新的中小型电原提供给。其规划管理理念与 STP-iXA2206/iXA3306 国产同样。新的**性笔记本转轴规划提高自己了选取能力，这个结合的食品非常易进行安装且土地征用总面积小，能作为使用平台的分立式化改善计划。
技术应用
夹层玻璃铝层
月亮能 PVD
实业溅射
形态与优越性
泵和操作器相互不须得连接方式线缆。
解除了普通架装式掌握器的按装环境空间与成品本。
密集型来设计使装愈发利于，占房屋地面占地更小。
与 STP-A1603 配合时在 8” TMP 同一种新产品中吸取进程高。
使高甲烷气体气速的显卡功耗变低了 32%。
I/O 跨网、RS232C、RS485、STP-Link 是高配接口。
可选装配 Profibus 和 DeviceNet。
The STP iXR2206 Maglev turbo-molecular pump utilizes a magnetic bearing and motor drive system and has an ultimate pressure of 10-9 Torr. This integrated controller series can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. It eliminates the need for a conventional, rack-mounted controller and interconnecting cables. The fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools. The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance. The STP iXR2206 can be connected directly to a terminal using a serial port and the STP-link Monitoring Software. The Software Displays, Rotational Speed, Motor Status, Temperature, Rotor balance status and Magnet bearing current.
MAGNETIC BEARING TECHNOLOGY:
The rotor is suspended by multi-axis magnetic bearings, so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for maintenance.
VIBRATION FREE:
Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peakto- peak vibration level is less than 0.02 μm. This amplitude remains constant throughout the life of the pump and is free from troublesome subharmonics.
OIL FREE:
All STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in industry and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements).
MAINTENANCE FREE:
Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination.
AUTOMATIC BALANCING SYSTEM (ABS):
ABS is a unique patented development of 5-axis technology. If any rotor imbalance is introduced (by deposition of process by-products, for example), sensors in the pump detect changes in the rotor motion and compensate the magnetic bearing fields to allow the rotor to spin on its natural inertial axis. This minimises the vibration transmitted to the inlet flange. ABS works at all pump rotational speeds.
SAFETY BACKUP BEARINGS:
STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation..
The STP iXR2206 can be used for a variety of applications including but not limited to:
STP-iXR2206 国产磁悬浮电机按钮涡轮机原子泵可带来了业内人士的能力，机载的控制保护装置中带有新的中小型电原提供给。其规划管理理念与 STP-iXA2206/iXA3306 国产同样。新的**性笔记本转轴规划提高自己了选取能力，这个结合的食品非常易进行安装且土地征用总面积小，能作为使用平台的分立式化改善计划。
技术应用
夹层玻璃铝层
月亮能 PVD
实业溅射
形态与优越性
泵和操作器相互不须得连接方式线缆。
解除了普通架装式掌握器的按装环境空间与成品本。
密集型来设计使装愈发利于，占房屋地面占地更小。
与 STP-A1603 配合时在 8” TMP 同一种新产品中吸取进程高。
使高甲烷气体气速的显卡功耗变低了 32%。
I/O 跨网、RS232C、RS485、STP-Link 是高配接口。
可选装配 Profibus 和 DeviceNet。
Edwards STP iXR2206 5-axis Magnetic Bearing Turbo-Molecular Pump, ISO250F Inlet, Integrated Controller and built in power supply.
Edwards PN YT850Z000.
Edwards PN YT850Z000.
The STP iXR2206 Maglev turbo-molecular pump utilizes a magnetic bearing and motor drive system and has an ultimate pressure of 10-9 Torr. This integrated controller series can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. It eliminates the need for a conventional, rack-mounted controller and interconnecting cables. The fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools. The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance. The STP iXR2206 can be connected directly to a terminal using a serial port and the STP-link Monitoring Software. The Software Displays, Rotational Speed, Motor Status, Temperature, Rotor balance status and Magnet bearing current.
MAGNETIC BEARING TECHNOLOGY:
The rotor is suspended by multi-axis magnetic bearings, so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for maintenance.
VIBRATION FREE:
Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peakto- peak vibration level is less than 0.02 μm. This amplitude remains constant throughout the life of the pump and is free from troublesome subharmonics.
OIL FREE:
All STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in industry and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements).
MAINTENANCE FREE:
Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination.
AUTOMATIC BALANCING SYSTEM (ABS):
ABS is a unique patented development of 5-axis technology. If any rotor imbalance is introduced (by deposition of process by-products, for example), sensors in the pump detect changes in the rotor motion and compensate the magnetic bearing fields to allow the rotor to spin on its natural inertial axis. This minimises the vibration transmitted to the inlet flange. ABS works at all pump rotational speeds.
SAFETY BACKUP BEARINGS:
STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation..
The STP iXR2206 can be used for a variety of applications including but not limited to:
- Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
- Electron cyclotron resonance (ECR) etch
- Film deposition CVD, PECVD, ECRCVD, MOCVD
- Sputtering
- Ion implantation source, beam line pumping end station
- MBE
- Diffusion
- Photo resist stripping
- Crystal/epitaxial growth
- Wafer inspection
- Load lock chambers
- Scientific instruments: surface analysis, mass spectrometry, electron microscopy
- High energy physics: beam lines, accelerators
- Radioactive applications: fusion systems, cyclotrons