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  • 产品名称:STP-iXA4506C 爱德华磁悬浮涡轮分子泵

  • 产品型号:STP-iXA4506C
  • 产品厂商:Edwards
  • 产品文档:
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简单介绍:
STP-iXA4506C 爱德华磁悬浮涡轮分子泵由于采用全集成控制器和电源,不需要电缆和单独的 STP-iXA4506C 爱德华磁悬浮涡轮分子泵使用的,为如今具有挑战性的应用提供业内的性能、更好的气流能力和高温管理。
详情介绍:

概述
Edwards STP-iXA4506 系列磁悬浮涡轮分子泵 (TMP) 使用的,为如今具有挑战性的应用提供业内的性能、更好的气流能力和高温管理。

特性与优势
由于采用全集成控制器和电源,不需要电缆和单独的
控制器安装卡槽,从而使 TMP 组件具有成本效益且结构紧凑,能够快速简单地安装在狭小的空间。
大连续流量达 4300 sccm (N2),与 STP-XA4503 相比性能提高 50% 以上。
使用高 35 °C 的冷却水供应时,泵能够高效运转。
提供了温度管理系统 (TMS) 装置,用于处理在过程中产生的副产品。
I/O 远程、RS232C、RS485、STP-Link 是标配端口。
UL 标记,CE 标记,符合 SEMI-S2 和 RoHS 标准


数值

法兰片
KF40
截取线速度

N2/H2 升/秒
VG300
3800/2700
ISO320F
4000/2700
VG350
4300/2700
VG400
4300/2700
进行压缩比 N2/H2
>108 / 103
重力负荷 Pa (Torr) 10-7(10-9)
能接受的前级压 Pa (Torr) 266(2)
典雅体空气流速 N2 1
4300
(仅水冷散热器却) (Pa m3/sec) (7.26)
细颗粒物体流动速度 Ar 1
2600
(仅油放置冷却) (Pa m3/sec) (4.39)
額定极限速度 rpm 24,240
重新开启时光 一分钟 11
固定不动的位置
丝毫大方向
发送电压电流 V 200-240
大插入电功率

没有 TMS VA 1700
带 TMS VA 2200
总重 kg
VG300
109
ISO320F
111
VG350
104
VG400
111

Edwards STP iXA4506C 5-axis Magnetic Bearing Turbo-Molecular Pump, Corrosion Resistant Parts.
ISO320F Inlet, Integrated Controller and built in power supply.

Edwards PN YT780Z010.

The STP iXA4506C Maglev turbo-molecular pump utilizes a magnetic bearing and motor drive system and has an ultimate pressure of 10-9 Torr. This integrated controller series can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. It eliminates the need for a conventional, rack-mounted controller and interconnecting cables. The fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools. The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance. 

Achieving world-class pumping speed of 4300 l/s (N2) and throughput up to 4300 sccm (N2), on a 12-16 inch (300-400 mm) inlet flange, makes the STP-iXA4506C the ideal choice for a wide range of large volume high flow applicaitons. The STP iXA4506C can be connected directly to a terminal using a serial port and the STP-link Monitoring Software. The Software Displays, Rotational Speed, Motor Status, Temperature, Rotor balance status and Magnet bearing current.

CORROSION RESISTANT:
This pump has nickel coated rotors and stators and pump internals are suitable for corrosive gas applications. This ensures a high level of resistance to corrosion.

MAGNETIC BEARING TECHNOLOGY:
The rotor is suspended by multi-axis magnetic bearings, so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for maintenance.

VIBRATION FREE:
Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peakto- peak vibration level is less than 0.02 μm. This amplitude remains constant throughout the life of the pump and is free from troublesome subharmonics.

OIL FREE:
All STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in industry and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements).

MAINTENANCE FREE:
Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination.

AUTOMATIC BALANCING SYSTEM (ABS):
ABS is a unique patented development of 5-axis technology. If any rotor imbalance is introduced (by deposition of process by-products, for example), sensors in the pump detect changes in the rotor motion and compensate the magnetic bearing fields to allow the rotor to spin on its natural inertial axis. This minimises the vibration transmitted to the inlet flange. ABS works at all pump rotational speeds.

SAFETY BACKUP BEARINGS:
STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation..

The STP-iXA4506C can be used for a variety of applications including but not limited to:
  • Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
  • Electron cyclotron resonance (ECR) etch
  • Film deposition CVD, PECVD, ECRCVD, MOCVD
  • Sputtering
  • Ion implantation source, beam line pumping end station
  • MBE
  • Diffusion
  • Photo resist stripping
  • Crystal/epitaxial growth
  • Wafer inspection
  • Load lock chambers
  • Scientific instruments: surface analysis, mass spectrometry, electron microscopy
  • High energy physics: beam lines, accelerators
  • Radioactive applications: fusion systems, cyclotrons

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