厂品内容
  • 产品名称:STP-iXA3306C 爱德华磁悬浮涡轮分子泵

  • 产品型号:STP-iXA3306C
  • 产品厂商:Edwards
  • 产品文档:
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简单介绍:
STP-iXA3306C 爱德华磁悬浮涡轮分子泵可提供业内的性能,可将小型电源供给集成到机载控制器内(成熟的 STPiXA3305 系列的新)。 STP-iXA3306C 爱德华磁悬浮涡轮分子泵该泵的高度等于 STP-XA2703/XA3203 的高度,也等于 STP-iXA3305 系列(不带其电源供给 (iPS-1200))的高度。 这一集成的产品易于安装且占地面积小,可作为应用工具的一体化解决方案。
详情介绍:
概要
STP-iXA3306 系统磁浮物涡轮增压碳原子泵可供应行业内的特性,可将微型开关电源市场出清集合到机载管控器内(成熟完善的 STPiXA3305 系统的新)。
该泵的高强度约乘以 STP-XA2703/XA3203 的高强度,也约乘以 STP-iXA3305 款型(没有其电压市场机制 (iPS-1200))的高强度。 一种ibms的產品有利的安装且占地赔偿大小小,可用为选用软件的合一化处理好规划。

用途
铝合金(铝)、钨和电物质(腐蚀物)各种多晶硅等亚铁离子刻蚀(氯化物、氟化物和溴化物)
微电子螺旋共振现象 (ECR) 刻蚀
pe膜岩浆岩 CVD、PECVD、ECRCVD、MOCVD
溅射
铁离子侵入源,射束线混凝土泵送和站

特性与优势
紧奏型轿车型开发,属于结合的抑制器
性自传感器磁场联轴器软件
数值化 5 轴掌握
与目前有蜗轮泵相信振动模式层面缩减了 50%
能够 分配为正常运行的腐蚀刺激性制造

数据源

入口处卡箍长度 ISO250F / VG250 / ICF305
前级抽气口长宽高 KF40
抽速 N2 2650 ls-1
抽速 Ar 2300 ls-1
压缩的比 N2/H2 >108 / 2 x 103
程度有压力 10-7 Pa (10-9 Torr)
合法的前级压强 266 Pa (2 Torr)
臭氧层流 N2 (仅风冷) 4000 sccm

(6.76 Pam3s-1)
层结流 Ar (仅风冷) 2100 sccm

(3.55 Pam3s-1)
载荷系数速率 27700 rpm
启动的时长 <10 分鐘
稳定所在位置 某些趋势
手机输入电阻值 200-240 V
大读取功效(没有 TMS) 1500 VA
大输出输出功率(带 TMS) 1800 VA
称重 80 kg

臭氧层流实用到在 25 ºC 下类♊的风空气冷🅷却水温下连继泵送混凝土 N2  或 Ar 废气,以及用前级泵(10,000 l/min 图片尺寸)的情况发生。 它会随必要条件变而变。



Edwards STP iXA3306C 5-axis Magnetic Bearing Turbo-Molecular Pump, Corrosion Resistant Parts.
ISO250F Inlet, Integrated Controller and built in power supply.

Edwards PN YT820Z020.

The STP iXA3306C Maglev turbo-molecular pump utilizes a magnetic bearing and motor drive system and has an ultimate pressure of 10-9 Torr. This integrated controller series can be fully interfaced with advanced controllers to operate on a wide range of applications and processes. It eliminates the need for a conventional, rack-mounted controller and interconnecting cables. The fully integrated product offers easy installation and small footprint as an all-in-one solution for all application tools. The rotor is entirely suspended by magnetic bearings so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for consequent pump maintenance. The STP iXA3306C can be connected directly to a terminal using a serial port and the STP-link Monitoring Software. The Software Displays, Rotational Speed, Motor Status, Temperature, Rotor balance status and Magnet bearing current.

CORROSION RESISTANT:
This pump has nickel coated rotors and stators and pump internals are suitable for corrosive gas applications. This ensures a high level of resistance to corrosion.

MAGNETIC BEARING TECHNOLOGY:
The rotor is suspended by multi-axis magnetic bearings, so all contact between the rotor and the remainder of the pump is eliminated. As well as giving very low vibration, the elimination of contact means no bearing wear and no requirement for maintenance.

VIBRATION FREE:
Magnetic levitation of the rotor results in an extremely low level of noise and vibration. Peakto- peak vibration level is less than 0.02 μm. This amplitude remains constant throughout the life of the pump and is free from troublesome subharmonics.

OIL FREE:
All STP turbomolecular pumps are oil free. The use of magnetic bearings eliminates all hydrocarbon lubricants ensuring no contamination of the vacuum process from the turbomolecular pump. This feature is vital in industry and in surface science or high energy physics applications (where even minute degrees of contamination disrupt measurements).

MAINTENANCE FREE:
Unlike conventional mechanical bearings, magnetic levitation means there is no frictional contact, eliminating sources of wear and vibration. This feature enables STP turbomolecular pumps to run for years with virtually no maintenance, reducing annual operating costs to a minimum and ensuring maximum up-time is achieved. This maintenance free feature can be particularly beneficial on processes producing chemical or radioactive contamination.

AUTOMATIC BALANCING SYSTEM (ABS):
ABS is a unique patented development of 5-axis technology. If any rotor imbalance is introduced (by deposition of process by-products, for example), sensors in the pump detect changes in the rotor motion and compensate the magnetic bearing fields to allow the rotor to spin on its natural inertial axis. This minimises the vibration transmitted to the inlet flange. ABS works at all pump rotational speeds.

SAFETY BACKUP BEARINGS:
STP pumps have dry lubricated axial and radial mechanical bearings as safety backup bearings. These support the rotor and protect the pump in the event of a total disruption of magnetic suspension or a massive air inrush which overcomes the magnetic bearing stiffness. These high precision ball bearings are dry lubricated and are not in contact with the rotor during normal operation..

The STP iXA3306C can be used for a variety of applications including but not limited to:
  • Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
  • Electron cyclotron resonance (ECR) etch
  • Film deposition CVD, PECVD, ECRCVD, MOCVD
  • Sputtering
  • Ion implantation source, beam line pumping end station
  • MBE
  • Diffusion
  • Photo resist stripping
  • Crystal/epitaxial growth
  • Wafer inspection
  • Load lock chambers
  • Scientific instruments: surface analysis, mass spectrometry, electron microscopy
  • High energy physics: beam lines, accelerators
  • Radioactive applications: fusion systems, cyclotrons


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