成品情况
  • 产品名称:STP-iX455 Edwards高真空涡轮分子泵

  • 产品型号:STP-iX455
  • 产品厂商:Edwards
  • 产品文档:
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简单介绍:
STP-iX455 爱德华涡轮分子泵 ISO100K氮气抽速为 450 ls-1 STP-iX455 爱德华涡轮分子泵 ISO100K具有性磁力轴承和电机驱动系统
详情介绍:
概述
STP-iX455 泄压阀碳原子泵体现了性磁性滚针轴承和电机马达驱动器模式,与上个代泄压阀泵对比将震动降了 50%。通过融合的把控好器,不可以施用传统与现代的安转于机马路上的把控好器及互连拖链电缆,不可以水冷式却。
此泵的氦气抽速为 450 ls-1。STP-iX455 较为满足电子器件光学显微镜、测量学、光刻和另外的对振功的app。

应用
重金属(铝)、钨和电媒介(氧化反应物)或者多晶硅等铁离子刻蚀(氯化物、氟化物和溴化物)
智能旋回共鸣 (ECR) 刻蚀
聚酰亚胺膜堆积 CVD、PECVD、ECRCVD、MOCVD
溅射
正离子灌入源,射束线泵送混凝土端点站
MBE
粘附
光致抗蚀剂出膜
多晶体/晶膜生张
晶片查验
根据锁正空腔
合理实验仪器:表明研究、质谱研究、电子厂显微镜
震撼力学:射束线、加快器

牵扯线软件:协同系統、旋回


功能和优势
省油的suv型设定,包含集成化的操作器
性自感应器轴套体系
大网络化 5 轴有效控制
与现存蜗轮泵相信振功行政级别大大减少了 50%
不错配置单为进行腐烛性制造
会自动均衡性系统软件 (ABS) 规范标准
一键减振 (AVR) 准则
列于 UL 中,都具有 CE 标记图片,具有 SEMI® S2

数据信息

入口通道法兰片 ISO100K
抽速
N2 300 ls-1
H2 300 ls-1
压解比
N2 >108
H2 >1 x 104
极限值负荷 6.5 x 10-6 Pa
大业务心理压力 1.3 x 10-1 Pa
容许的前级心理压力 67 Pa
特殊线速度 55000 rpm
启动服务器的时间 <6 半小时
进行固定地理位置 所有导向
蒸发形式 天然待待一系列冷却(加温主气体水下混凝土时实施水待待一系列冷却或废气待待一系列冷却)
润滑液油 不想要
前级泵 240 lmin-1
盗取磁通量
轴上目标 <100 m/Gauss
径向朝向 <100 m/Gauss
大环境平均温度条件 0 至 40 °C
手机存储温度因素标准 -25 至 55 °C
毛重 15 kg

Edwards STP-iX455 5-axis Magnetic Bearing Turbo-Molecular Pump, ISO100K, LF100 Inlet with Integrated Controller
Edwards PN PT640Z010. For power requirements use an external 48 VDC power supply.

The STP-iX455 turbo-molecular pump utilizes a magnetic bearing and motor drive system and has an ultimate pressure of 1.3x10-10 Torr (8 in. O.D. conflat inlet). With its multi-axis magnetic bearing system contact between the rotor and the remainder of the pump is completely eliminated, effectively producing an unparalleled level of vibration and heat reduction. No frictional contact in the STP-iX455 also reduces wear and enables it to run virtually maintenance free for years. With an integrated controller eliminates the need for a conventional rack mounted controller. This STP-iX455 turbo pump runs so cool it needs no water for cooling. No need for interconnecting cables but you will need a 48VDC external power supply source not provided. (model with power supply is available on this website).

The STP-iX455 has a built in automatic balancing system (ABS), a key feature of 5-axis magnetic drive technology. Sensors in the pump detect imbalance in the rotor motion and respond by adjusting the bearings magnetic fields to permit the rotor to spin on its own inertial axis, reducing vibration sent to the inlet flange. This function of the STP-iX455 works at all rotational speeds to ensure pump safety. All STP series pumps have dry lubricated radial and axial mechanical bearings as backup safety bearings. In the event of total failure of the magnetic bearings, these mechanical bearings will support the rotor and protect the pump. 

The STP-iX-455 can be connected directly to a terminal using a serial port and the STP-link Monitoring Software. The Software Displays, Rotational Speed, Motor Status, Temperature, Rotor balance status & Magnet bearing current.

The STP-iX455 can be used for a variety of applications including but not limited to:
  • Plasma etch (chlorine, fluorine and bromine chemistries) for metal (aluminum), tungsten and dielectric (oxide) and polysilicon
  • Electron cyclotron resonance (ECR) etch
  • Film deposition CVD, PECVD, ECRCVD, MOCVD
  • Sputtering
  • Ion implantation source, beam line pumping end station
  • MBE
  • Diffusion
  • Photo resist stripping
  • Crystal/epitaxial growth
  • Wafer inspection
  • Load lock chambers
  • Scientific instruments: surface analysis, mass spectrometry, electron microscopy
  • High energy physics: beam lines, accelerators
  • Radioactive applications: fusion systems, cyclotrons


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